Direct milling of 25 nm in diameter gold and graphene nanogears by a focused He+ ion beam
نویسندگان
چکیده
The direct focused helium ion beam milling of solid-state nanogears down to 25 nm in diameter is presented. Sapphire the supporting surface release heat created by this process. For free resist process, He+ dosing was first calibrated limit lateral fusion deposited nanomaterial during sculpturing teeth. were fabricated a 20 thickness Au nanomaterial, graphene multilayer and monolayer having van der Waals compatible with single molecule-gears for transmission rotation. Optimizing again electron microscope grid, standing also sculptured 40 diameter.
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ژورنال
عنوان ژورنال: Vacuum
سال: 2023
ISSN: ['0042-207X', '1879-2715']
DOI: https://doi.org/10.1016/j.vacuum.2022.111605